Measurement of gas flow is a key point in the field of gas application. In recent decades, thermal mass flow (TMF) meters are widely used in measuring the mass of gas. The TMF meters have many advantages such as wide applicable fields it can be applied to many kinds of pipelines and different types of gasses), wide measurement range, and high measurement accuracy and repeatability.
Thermal mass flow meters generally use combinations of heated elements and temperature sensors to measure the difference between static and flowing heat transfer to a fluid and infer its flow with a knowledge of the fluid’s specific heat and density. The fluid temperature is also measured and compensated for. If the density and specific heat characteristics of the fluid are constant, the meter can provide a direct mass flow readout, and does not need any additional pressure temperature compensation over their specified range.
Today, thermal mass flowmeters are used to measure the flow of gasses in a growing range of applications, such as chemical reactions or thermal transfer applications that are difficult for other flow metering technologies. This is because thermal mass flow meters monitor variations in one or more of the thermal characteristics (temperature, thermal conductivity, and/or specific heat) of gaseous media to define the mass flow rate.